Plasmas have been a key component in the fabrication of microelectronic devices for over 30 years and their contribution to the process flow that forms complex electronic devices from silicon wafers continues to grow.  Over 25% of the over 500 individual steps taken to fabricate an integrated circuit rely on plasma processing.

In this talk we will review some of the challenges posed for integrated circuit fabrication and the solutions that plasma science has to offer.  Future plasma science roadmaps to further contribute to plasma science’s critical role in this industry will also be posed.

Biography

Steve Shannon is Professor and Director of Graduate Programs for the Department of Nuclear Engineering at NC State.  Prior to his arrival at NC State he worked as a member of the technical staff at Applied Materials Inc. in Sunnyvale CA where he developed plasma technology for the semiconductor device manufacturing industry.  Steve has never received a Grammy nomination and blames the Recording Academy of the United States for not recognizing his amazing musical talent.  This may or may not be true.

 

Thursday, February 2. 2023
4:00 pm seminar

Hybrid Option  (Speaker is in person)

zoom (link upon request)
or
Room 1202 Burlington Labs