Steven Shannon
Professor of Nuclear Engineering, Director of Nuclear Engineering Graduate Program

- 919-515-3292
- scshannon@ncsu.edu
- Burlington Laboratory 2112
- Visit My Website
Dr. Steve Shannon works in the area of industrial applications of plasma discharges. Plasmas are currently used for everything from decorative enhancement of bathroom fixtures to fabrication of the next generation of micro- and nano- scale devices. Plasma systems for industrial applications is a multi-billion dollar industry. His research focuses on enhancing current plasma applications being used and developed today and developing new plasma applications for next generation material and device fabrication.
Education
Nuclear Engineering
University of Michigan
Nuclear Engineering
University of Michigan
Nuclear Engineering
University of Michigan
Research Description
Dr. Shannon's research is in the industrial applications of plasma discharges.
Publications
- Effect of dielectric target properties on plasma surface ionization wave propagation
- Morsell, J., Bhatt, N., Dechant, C., & Shannon, S. (2023), Journal of Physics D: Applied Physics. https://doi.org/10.1088/1361-6463/acbfc9
- Comparison of glancing-angle scatterings on different materials in a high aspect ratio plasma etching process using molecular dynamics simulation
- Du, Y., Kruger, F., Nam, S. K., Lee, H., Yoo, S., Eapen, J., … Shannon, S. (2022), JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 40(5). https://doi.org/10.1116/6.0002008
- Electron temperature measurements with a hairpin resonator probe in a pulsed low pressure capacitively coupled plasma
- Peterson, D., Xiao, Y., Ford, K., Kraus, P., & Shannon, S. (2021), Plasma Sources Science and Technology, 5. https://doi.org/10.1088/1361-6595/ac02b2
- Focus ring geometry influence on wafer edge voltage distribution for plasma processes
- Xiao, Y., Du, Y., Smith, C., Nam, S. K., Lee, H., Lee, J.-Y., & Shannon, S. (2021), Journal of Vacuum Science & Technology A. https://doi.org/10.1116/6.0000981
- Modulating power delivery in a pulsed ICP discharge via the incorporation of negative feedback mechanisms
- Smith, C. L., Nam, S. K., Bae, K., Lee, J.-Y., & Shannon, S. (2021), JOURNAL OF APPLIED PHYSICS, 130(16). https://doi.org/10.1063/5.0060240
- Erratum: Power Matching to Pulsed Inductively Coupled Plasmas [J. Appl. Phys. 127, 133302 (2020)]
- Qu, C., Lanham, S. J., Shannon, S. C., Nam, S. K., & Kushner, M. J. (2020), Journal of Applied Physics. https://doi.org/10.1063/5.0023888
- Power matching to pulsed inductively coupled plasmas
- Qu, C., Lanham, S. J., Shannon, S. C., Nam, S. K., & Kushner, M. J. (2020), Journal of Applied Physics. https://doi.org/10.1063/5.0002522
- Radiofrequency phase resolved electron density measurements with the hairpin resonator probe
- Peterson, D. J., Ford, K., Brandon, J., Shannon, S. C., Koh, T., Chua, T. C., … Kraus, P. A. (2020), JOURNAL OF PHYSICS D-APPLIED PHYSICS, 53(14). https://doi.org/10.1088/1361-6463/ab6944
- Complex transients in power modulated inductively-coupled chlorine plasmas
- List, T., Ma, T., Arora, P., Donnelly, V. M., & Shannon, S. (2019), Plasma Sources Science and Technology, 28(2), 025005. https://doi.org/10.1088/1361-6595/ab000c
- Doppler-free, Stark broadened profiles at low plasma densities in helium
- Zafar, A., Martin, E., & Shannon, S. (2019), Journal of Quantitative Spectroscopy and Radiative Transfer, 230, 48–55. https://doi.org/10.1016/j.jqsrt.2019.03.020
Grants
- Nuclear Energy University Programs - Fellowship and Scholarship Support North Carolina State University
- US Dept. of Energy (DOE)(8/01/21 - 8/31/33)
- Harnessing (bio-)electrochemical Technologies as Sustainable Sources for on Demand Precision Agriculture
- Game-Changing Research Incentive Program for Plant Sciences (GRIP4PSI)(2/17/20 - 6/30/23)
- North Carolina State University's Graduate Fellowship In Nuclear Engineering (NCSU-GFINE)– 2018
- US Nuclear Regulatory Commission(8/30/19 - 8/29/23)
- Center for Low Temperature Plasma Interactions with Complex Interfaces
- US Dept. of Energy (DOE)(8/15/19 - 8/14/23)
- Fabrication of Plasma Source for Chitosan Depyrogenation
- National Institutes of Health (NIH)(5/01/18 - 3/31/21)
- Multi-Frequency Harmonic Drive for Enhanced Control in HAR Processes, CPLAM Core Project
- Plasma-Therm(6/01/18 - 5/31/19)
- Collaborative Research: SI2-SSE: An open source multi-physics platform to advance fundamental understanding of plasma physics and enable impactful application of plasma systems
- National Science Foundation (NSF)(9/01/17 - 5/31/21)
- Reactor Design and Effectiveness of Design in Depyrogenation Processes using Karamedica Data.
- Karamedica Inc.(2/15/17 - 9/30/17)
- Construction and Characterization of a Pulsed Gas Delivery System to Elucidate Plasma Response to Time Varying Gas Composition
- Samsung Electro-Mechanics Co. Ltd.(1/23/17 - 3/31/18)
- Samsung Mechatronics Research Division Directed Research in Low Temperature Plasma Science
- Samsung Electronics Co., Ltd. - Korea(5/01/16 - 12/31/23)