Education

Research Description

Dr. Shannon's research is in the industrial applications of plasma discharges.

Publications

Driving frequency fluctuations in pulsed capacitively coupled plasmas

Poulose, J., Goeckner, M., Shannon, S., Coumou, D., & Overzet, L. (2017), European Physical Journal. D, Atomic, Molecular and Optical Physics, 71(9).

Electron neutral collision frequency measurement with the hairpin resonator probe

Peterson, D. J., Kraus, P., Chua, T. C., Larson, L., & Shannon, S. C. (2017), Plasma Sources Science & Technology, 26(9).

Size dependence of nanoscale wear of silicon carbide

Tangpatjaroen, C., Grierson, D., Shannon, S., Jakes, J. E., & Szlufarska, I. (2017), ACS Applied Materials & Interfaces, 9(2), 1929–1940.

All the catalytic active sites of MoS2 for hydrogen evolution

Li, G. Q., Zhang, D., Qiao, Q., Yu, Y. F., Peterson, D., Zafar, A., … Cao, L. Y. (2016), Journal of the American Chemical Society, 138(51), 16632–16638. https://doi.org/10.1021/jacs.6b05940

Amorphization resistance of nano-engineered SiC under heavy ion irradiation

Imada, K., Ishimaru, M., Xue, H. Z., Zhang, Y. W., Shannon, S. C., & Weber, W. J. (2016), Journal of Nuclear Materials, 478, 310–314.

Dose dependence of helium bubble formation in nano-engineered SiC at 700 degrees C

Chen, C. H., Zhang, Y., Wang, Y., Crespillo, M. L., Fontana, C. L., Graham, J. T., … Weber, W. J. (2016), Journal of Nuclear Materials, 472, 153–160.

Fully coupled simulation of the plasma liquid interface and interfacial coefficient effects

Lindsay, A. D., Graves, D. B., & Shannon, S. C. (2016), Journal of Physics. D, Applied Physics, 49(23).

A temporally and spatially resolved electron density diagnostic method for the edge plasma based on Stark broadening

Zafar, A., Martin, E. H., Shannon, S. C., Isler, R. C., & Caughman, J. B. O. (2016), Review of Scientific Instruments, 87(11).

Atomistic structures of nano-engineered SiC and radiation-induced amorphization resistance

Imada, K., Ishimaru, M., Sato, K., Xue, H. Z., Zhang, Y. W., Shannon, S., & Weber, W. J. (2015), Journal of Nuclear Materials, 465, 433–437.

Control of ion energy distributions using phase shifting in multi-frequency capacitively coupled plasmas

Zhang, Y. T., Zafar, A., Coumou, D. J., Shannon, S. C., & Kushner, M. J. (2015), Journal of Applied Physics, 117(23).

View all publications via NC State Libraries

Grants

Multi-Frequency Harmonic Drive for Enhanced Control in HAR Processes, CPLAM Core Project

Plasma-Therm(6/01/18 - 5/31/19)

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Multi-Frequency Harmonic Drive for Enhanced Control in HAR Processes, CPLAM Core Project

Sponsor: Plasma-Therm

Start Date: 6/01/18

End Date: 5/31/19

Abstract

This is a revised budget per program director feedback to original proposal submission. Original budget was for $11,500. Program director requests a rebudget to $10,000. An additonal supplement of $31,000 is being sent from participant

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Collaborative Research: SI2-SSE: An open source multi-physics platform to advance fundamental understanding of plasma physics and enable impactful application of plasma systems

National Science Foundation (NSF)(9/01/17 - 8/31/19)

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Collaborative Research: SI2-SSE: An open source multi-physics platform to advance fundamental understanding of plasma physics and enable impactful application of plasma systems

Sponsor: National Science Foundation (NSF)

Start Date: 9/01/17

End Date: 8/31/19

Abstract

Multi-physics platforms have proven to be a powerful tool in plasma science. Commercial solvers such as COMSOL and ANSYS are the workhorses that enable researchers to study complex systems spanning fluids, chemistry, and electromagnetics in combination to better understand plasma phenomena. , Recent developments in open source Multiphysics platforms such as Kratos, MOOSE, and OpenFoam have opened up the range of problems that can be tackled by enabling affordable large scale HPC Multiphysics simulation. The Multiphysics Object-Oriented Simulation Environment (MOOSE), in particular, has experienced tremendous growth in application and user base since its release, with modules spanning microstructure evolution of materials, chemistry, and superconductivity to complement its original core mission to advance nuclear reactor simulation. MOOSE is an extremely capable Multiphysics platform capable of running in a massively parallel computing environment to address some of the pressing issues in plasma science such as plasma material interaction and simulation of the near surface interface including conditions when that surface is powered by an electrostatic or electromagnetic source.

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Reactor Design and Effectiveness of Design in Depyrogenation Processes using Karamedica Data.

Karamedica Inc.(2/15/17 - 9/30/17)

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Reactor Design and Effectiveness of Design in Depyrogenation Processes using Karamedica Data.

Sponsor: Karamedica Inc.

Start Date: 2/15/17

End Date: 9/30/17

Abstract

• Construction of a prototype plasma reactor designed for the depyrogenation of chitosan powder using an atmospheric nitrogen fluidized bed plasma reactor.

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Construction and Characterization of a Pulsed Gas Delivery System to Elucidate Plasma Response to Time Varying Gas Composition

Samsung Electro-Mechanics Co. Ltd.(1/23/17 - 3/31/18)

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Construction and Characterization of a Pulsed Gas Delivery System to Elucidate Plasma Response to Time Varying Gas Composition

Sponsor: Samsung Electro-Mechanics Co. Ltd.

Start Date: 1/23/17

End Date: 3/31/18

Abstract

This study will focus on gas driven plasma transients. The goal is to fabricate a gas delivery system that can deliver a time dependent gas composition to a plasma reactor repeatedly and with good reproducibility. This system will enable time dependent measurement of the plasma response to these changes in gas composition. The final deliverable of this scope of work is a prototype gas delivery system that enables repetitive transition in gas composition delivery into a plasma reactor, characterization of plasma response to these transients through optical, electrical, and particle measurements in the plasma discharge, construction of two systems for use at North Carolina State University and the University of Houston, and installation and training at both institutions for further studies.

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Samsung Mechatronics Research Division Directed Research in Low Temperature Plasma Science

Samsung Electronics Co., Ltd. - Korea(5/01/16 - 4/30/19)

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Samsung Mechatronics Research Division Directed Research in Low Temperature Plasma Science

Sponsor: Samsung Electronics Co., Ltd. - Korea

Start Date: 5/01/16

End Date: 4/30/19

Abstract

We propose a basic science oriented approach that will advance the fundamental understanding of transient operating plasma systems (TOPS) and enable process and hardware design that will extend plasma assisted manufacturing into areas not achievable with the existing technology structure. We present a research path focused on the “n+2” technology node while providing technical and collaborative deliverables that will also enable solutions for more near term technical challenges for the Samsung MRD group.

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Turbulent MHD flow modeling in annular linear induction pumps with validation experiments

US Dept. of Energy (DOE)(10/01/16 - 9/30/19)

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Turbulent MHD flow modeling in annular linear induction pumps with validation experiments

Sponsor: US Dept. of Energy (DOE)

Start Date: 10/01/16

End Date: 9/30/19

Abstract

This proposed scope of work seeks to advance EMP design efforts for liquid metal reactors by 1.) improving MHD modelling capability, particularly by incorporating turbulence modeling and investigating the MHD stability criteria, 2.) advancing multi-physics simulation of these systems leveraging the open source MOOSE platform that is already used in many nuclear reactor and reactor system efforts, and 3.) constructing a low barrier EMP test loop for model validation and instruction that can be easily replicated at low cost at other facilities.

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International Experiences for Students in Plasma Science: Student Travel Support to Attend the 2016 Gaseous Electronics Conference

National Science Foundation (NSF)(9/01/16 - 2/28/17)

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International Experiences for Students in Plasma Science: Student Travel Support to Attend the 2016 Gaseous Electronics Conference

Sponsor: National Science Foundation (NSF)

Start Date: 9/01/16

End Date: 2/28/17

Abstract

This proposal requests funds to support travel for students from US based institutions to attend the 2016 American Physical Society topical conference on Gaseous Electronics, more commonly referred to as the Gaseous Electronics Conference. The conference will be hosted by the Ruhr-Universität Bochum in Germany from 10 October 2016 to 14 October 2016. Historically, approximately 20 students from US institutions have requested support for travel to previous Gaseous Electronics Conferences. This request is for a modest travel stipend of approximately $1000 per student for approximately 20 students is requested to defer approximately 50% of the estimated travel cost that is summarized in this proposal’s budget justification. These support levels are consistent with previous efforts to support student overseas travel to the conference.

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Ion energy measurement in industrial plasma reactors

Tokyo Electron America, Inc.(1/01/16 - 8/31/18)

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Ion energy measurement in industrial plasma reactors

Sponsor: Tokyo Electron America, Inc.

Start Date: 1/01/16

End Date: 8/31/18

Abstract

While measurement techniques for the extraction of ion energy distribution functions (IEDf) at low RF-bias power are mature, techniques for measurement of IEDf at high RF power and energies greater than 1000 eV in mixed frequency systems are not well established. Not only is there the issue of the detector survival there is also the issue of measurement accuracy due to detector retarding field energy analyzer (RFEA) circuitry and detector interactions with the plasma and chamber. The objective of the project is the measurement of IEDfs in single and mixed frequency RIE plasmas for the purpose of testing sheath models and plasma equivalent circuit models. The experiments will be performed on a DC/RF tests bed at Tokyo Electron America’s Plasma Lab. Uncertainty in these measurements is due to circuit interactions between the plasma and retarding field energy analyzer. An additional objective of the work is to characterize the role circuitry plays on the fidelity of the measurement. The impact of charged particle swarm behavior in the RFA and its impact on measurement fidelity is a further facet of the study.

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Industry/University Cooperative Research Center for Lasers and Plasmas for Advanced Manufacturing (CLPAM), Full Membership

Plasma-Therm(1/01/15 - 12/31/15)

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Industry/University Cooperative Research Center for Lasers and Plasmas for Advanced Manufacturing (CLPAM), Full Membership

Sponsor: Plasma-Therm

Start Date: 1/01/15

End Date: 12/31/15

Abstract

This record details membership for Applied Materials in the Center for Lasers and Plasmas in Advanced Manufacturing.

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MKS C-LPAM IUCRC Full Membership - Year 1

MKS Instruments (1/01/15 - 12/31/16)

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MKS C-LPAM IUCRC Full Membership - Year 1

Sponsor: MKS Instruments

Start Date: 1/01/15

End Date: 12/31/16

Abstract

This record details the terms and conditions for MKS membership in the NSF IUCRC titled Center for Lasers and Plasmas in Advanced Manufacturing for the period 7/2014 to 7/2015.

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