Education

Research Description

Dr. Shannon's research is in the industrial applications of plasma discharges.

Publications

Comparison of glancing-angle scatterings on different materials in a high aspect ratio plasma etching process using molecular dynamics simulation

Du, Y., Krüger, F., Nam, S. K., Lee, H., Yoo, S., Eapen, J., … Shannon, S. (2022), Journal of Vacuum Science & Technology A. https://doi.org/10.1116/6.0002008

Electron temperature measurements with a hairpin resonator probe in a pulsed low pressure capacitively coupled plasma

Peterson, D., Xiao, Y., Ford, K., Kraus, P., & Shannon, S. (2021), Plasma Sources Science and Technology, 5. https://doi.org/10.1088/1361-6595/ac02b2

Focus ring geometry influence on wafer edge voltage distribution for plasma processes

Xiao, Y., Du, Y., Smith, C., Nam, S. K., Lee, H., Lee, J.-Y., & Shannon, S. (2021), Journal of Vacuum Science & Technology A. https://doi.org/10.1116/6.0000981

Modulating power delivery in a pulsed ICP discharge via the incorporation of negative feedback mechanisms

Smith, C. L., Nam, S. K., Bae, K., Lee, J.-Y., & Shannon, S. (2021), JOURNAL OF APPLIED PHYSICS, 10. https://doi.org/10.1063/5.0060240

Erratum: Power Matching to Pulsed Inductively Coupled Plasmas [J. Appl. Phys. 127, 133302 (2020)]

Qu, C., Lanham, S. J., Shannon, S. C., Nam, S. K., & Kushner, M. J. (2020), Journal of Applied Physics. https://doi.org/10.1063/5.0023888

Power matching to pulsed inductively coupled plasmas

Qu, C., Lanham, S. J., Shannon, S. C., Nam, S. K., & Kushner, M. J. (2020), Journal of Applied Physics. https://doi.org/10.1063/5.0002522

Radiofrequency phase resolved electron density measurements with the hairpin resonator probe

Peterson, D. J., Ford, K., Brandon, J., Shannon, S. C., Koh, T., Chua, T. C., … Kraus, P. A. (2020), JOURNAL OF PHYSICS D-APPLIED PHYSICS, 53(14). https://doi.org/10.1088/1361-6463/ab6944

Complex transients in power modulated inductively-coupled chlorine plasmas

List, T., Ma, T., Arora, P., Donnelly, V. M., & Shannon, S. (2019), Plasma Sources Science and Technology, 28(2), 025005. https://doi.org/10.1088/1361-6595/ab000c

Doppler-free, Stark broadened profiles at low plasma densities in helium

Zafar, A., Martin, E., & Shannon, S. (2019), Journal of Quantitative Spectroscopy and Radiative Transfer, 230, 48–55. https://doi.org/10.1016/j.jqsrt.2019.03.020

Electromagnetics Simulations with Vector-valued Finite Elements in MOOSE

Icenhour, C. T., Lindsay, A. D., Martineau, R. C., & Shannon, S. (2019), In Idaho National Laboratory Report (No. INL/CON-18-52320-Rev000).

View all publications via NC State Libraries

Grants

Nuclear Energy University Programs - Fellowship and Scholarship Support North Carolina State University

US Dept. of Energy (DOE)(8/01/21 - 8/31/33)

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Nuclear Energy University Programs - Fellowship and Scholarship Support North Carolina State University

Sponsor: US Dept. of Energy (DOE)

Start Date: 8/01/21

End Date: 8/31/33

Abstract

This proposal is a request to be eligible to participate in DOE's Fellowship and Scholarship Support program where NE eligible students can apply for scholarships and fellowships per the Funding Opportunity Announcement. This is up to a 10 year cooperative agreement program and may run up to 13 years to accredited US Colleges and Universities for the US Department of Energy's Office of Nuclear Energy Fellowship and Scholarship Awards.  

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Harnessing (bio-)electrochemical Technologies as Sustainable Sources for on Demand Precision Agriculture

Game-Changing Research Incentive Program for Plant Sciences (GRIP4PSI)(2/17/20 - 6/30/23)

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Harnessing (bio-)electrochemical Technologies as Sustainable Sources for on Demand Precision Agriculture

Sponsor: Game-Changing Research Incentive Program for Plant Sciences (GRIP4PSI)

Start Date: 2/17/20

End Date: 6/30/23

Abstract

Enabling the next generation of sustainable farms requires a paradigm shift in resource management of the two most critical agricultural inputs for food production: water and nitrogen (N) - based fertilizer. Inefficient management of these resources increases food production costs, decreases productivity, and impacts the environment. An integrated approach is needed to improve the sustainability and efficiency throughout the production chain. Emerging (bio)electrochemical (BEC) technologies offer alternatives to conventional, fossil-fuel intensive N fertilizer production. Recently our team has demonstrated two game-changing BEC technologies: 1) microbial conversion of nitrogen gas into ammonium, and 2) plasma generation of N species (e.g., nitrate, nitrite) and other reactive species in water for fertilization and anti-pathogen benefits. We will integrate these technologies to produce BEC, N-based fertilizer, and with advanced sensor and delivery systems, we will precisely supply fertilizers for sustainable precision agriculture. Our proposed approach focuses on the development of a novel “BEC fertigation on demand system” by using sensor-driven data and molecular analyses to investigate BEC fertigation impact on the plants’ growth, adaptation, and microbiome; its impact on food safety and quality, and its economic feasibility for on-farm deployment.

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North Carolina State University's Graduate Fellowship In Nuclear Engineering (NCSU-GFINE)– 2018

US Nuclear Regulatory Commission(8/30/19 - 8/29/23)

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North Carolina State University's Graduate Fellowship In Nuclear Engineering (NCSU-GFINE)– 2018

Sponsor: US Nuclear Regulatory Commission

Start Date: 8/30/19

End Date: 8/29/23

Abstract

This proposal is a request for financial support for two graduate students every year for four consecutive years in nuclear engineering through the North Carolina State University’s Graduate Fellowship in Nuclear Engineering (NCSU–GFINE) program that helps to develop a highly talented and competent workforce with post-baccalaureate education capable of leading the nation’s charge to reinvigorate its nuclear industry. Every attempt will be made during the recruitment and selection processes to ensure that the sponsored students reflect the diverse groups that make up our nation’s populace. Moreover, the high academic standards inherent to NC State’s Department of Nuclear Engineering and the proposed selection formula will ensure the highest caliber of the sponsored fellows. These individuals will shepherd the design, construction, operation, and regulation of new and innovative nuclear facilities, while maintaining the safety and security of processes for the handling of requisite nuclear materials in the coming decades, a period crucial for the revamping of an industry that has fallen to neglect. Upon graduation, the sponsored fellows will be contractually required to complete nuclear-related employment at the rate of six months per year of NCSU–GFINE sponsorship. The support of industry for the Department and its mission, and their interest in NCSU–GFINE is evidenced by hiring of our graduates.

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Center for Low Temperature Plasma Interactions with Complex Interfaces

US Dept. of Energy (DOE)(8/15/19 - 8/14/22)

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Center for Low Temperature Plasma Interactions with Complex Interfaces

Sponsor: US Dept. of Energy (DOE)

Start Date: 8/15/19

End Date: 8/14/22

Abstract

The center will carry out work on three standard plasma sources as well as non-standard sources intended to address specific science challenges by providing process conditions that cannot be reliably achieved on one of the standard source configurations. The NCSU effort, in collaboration with Minnesota, Sandia, Ohio State, and Maryland, will advance methodologies in the design and construction of plasma sources with repeatable and reproducible plasma conditions across a plurality of sources operating across multiple center locations. Using existing source matching methodologies as a baseline [1,2] this effort will identify critical design principles for source configurations that will contribute to the experimental efforts of the center. The design principles behind identical operation of multiple plasma reactors, often referred to as “chamber matching” is one of the biggest technical challenges in other industries where plasma processing is a well-established manufacturing technology. In this center effort, we will 1.) identify source design variables that most significantly alter standard source performance, 2.) establish best known practices for source facilitization (gas delivery, cooling, etc.), and 3.) establish best known practices for sample preparation and exposure during plasma-liquid and plasma-catalyst experiments. This effort will be a combination of design methodologies, simulation, and experimental measurements made both at NCSU and in collaboration with other center sites utilizing the standard sources established in this center.

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Fabrication of Plasma Source for Chitosan Depyrogenation

National Institutes of Health (NIH)(5/01/18 - 3/31/21)

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Fabrication of Plasma Source for Chitosan Depyrogenation

Sponsor: National Institutes of Health (NIH)

Start Date: 5/01/18

End Date: 3/31/21

Abstract

Plasma based depyrogenation of chitosan is a promising low cost surface modification that will greatly expand the range of application for chitosan in medical applications, particularly in the domain of internal medical application. NCSU will develop cost effective systems for the depyrogenation of chitosan and collaborate with Karamedica and Loma Linda Medical Center to demonstrate the necessary endotoxin reduction levels using plasma treatment on chitosan samples through controlled design and experimentation.

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Multi-Frequency Harmonic Drive for Enhanced Control in HAR Processes, CPLAM Core Project

Plasma-Therm(6/01/18 - 5/31/19)

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Multi-Frequency Harmonic Drive for Enhanced Control in HAR Processes, CPLAM Core Project

Sponsor: Plasma-Therm

Start Date: 6/01/18

End Date: 5/31/19

Abstract

This is a revised budget per program director feedback to original proposal submission. Original budget was for $11,500. Program director requests a rebudget to $10,000. An additonal supplement of $31,000 is being sent from participant

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Collaborative Research: SI2-SSE: An open source multi-physics platform to advance fundamental understanding of plasma physics and enable impactful application of plasma systems

National Science Foundation (NSF)(9/01/17 - 5/31/21)

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Collaborative Research: SI2-SSE: An open source multi-physics platform to advance fundamental understanding of plasma physics and enable impactful application of plasma systems

Sponsor: National Science Foundation (NSF)

Start Date: 9/01/17

End Date: 5/31/21

Abstract

Multi-physics platforms have proven to be a powerful tool in plasma science. Commercial solvers such as COMSOL and ANSYS are the workhorses that enable researchers to study complex systems spanning fluids, chemistry, and electromagnetics in combination to better understand plasma phenomena. , Recent developments in open source Multiphysics platforms such as Kratos, MOOSE, and OpenFoam have opened up the range of problems that can be tackled by enabling affordable large scale HPC Multiphysics simulation. The Multiphysics Object-Oriented Simulation Environment (MOOSE), in particular, has experienced tremendous growth in application and user base since its release, with modules spanning microstructure evolution of materials, chemistry, and superconductivity to complement its original core mission to advance nuclear reactor simulation. MOOSE is an extremely capable Multiphysics platform capable of running in a massively parallel computing environment to address some of the pressing issues in plasma science such as plasma material interaction and simulation of the near surface interface including conditions when that surface is powered by an electrostatic or electromagnetic source.

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Reactor Design and Effectiveness of Design in Depyrogenation Processes using Karamedica Data.

Karamedica Inc.(2/15/17 - 9/30/17)

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Reactor Design and Effectiveness of Design in Depyrogenation Processes using Karamedica Data.

Sponsor: Karamedica Inc.

Start Date: 2/15/17

End Date: 9/30/17

Abstract

• Construction of a prototype plasma reactor designed for the depyrogenation of chitosan powder using an atmospheric nitrogen fluidized bed plasma reactor.

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Construction and Characterization of a Pulsed Gas Delivery System to Elucidate Plasma Response to Time Varying Gas Composition

Samsung Electro-Mechanics Co. Ltd.(1/23/17 - 3/31/18)

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Construction and Characterization of a Pulsed Gas Delivery System to Elucidate Plasma Response to Time Varying Gas Composition

Sponsor: Samsung Electro-Mechanics Co. Ltd.

Start Date: 1/23/17

End Date: 3/31/18

Abstract

This study will focus on gas driven plasma transients. The goal is to fabricate a gas delivery system that can deliver a time dependent gas composition to a plasma reactor repeatedly and with good reproducibility. This system will enable time dependent measurement of the plasma response to these changes in gas composition. The final deliverable of this scope of work is a prototype gas delivery system that enables repetitive transition in gas composition delivery into a plasma reactor, characterization of plasma response to these transients through optical, electrical, and particle measurements in the plasma discharge, construction of two systems for use at North Carolina State University and the University of Houston, and installation and training at both institutions for further studies.

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Samsung Mechatronics Research Division Directed Research in Low Temperature Plasma Science

Samsung Electronics Co., Ltd. - Korea(5/01/16 - 6/30/22)

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Samsung Mechatronics Research Division Directed Research in Low Temperature Plasma Science

Sponsor: Samsung Electronics Co., Ltd. - Korea

Start Date: 5/01/16

End Date: 6/30/22

Abstract

We propose a basic science oriented approach that will advance the fundamental understanding of transient operating plasma systems (TOPS) and enable process and hardware design that will extend plasma assisted manufacturing into areas not achievable with the existing technology structure. We present a research path focused on the “n+2” technology node while providing technical and collaborative deliverables that will also enable solutions for more near term technical challenges for the Samsung MRD group.

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