Steven Shannon

Professor of Nuclear Engineering

Dr. Steve Shannon works in the area of industrial applications of plasma discharges. Plasmas are currently used for everything from decorative enhancement of bathroom fixtures to fabrication of the next generation of micro- and nano- scale devices. Plasma systems for industrial applications is a multi-billion dollar industry. His research focuses on enhancing current plasma applications being used and developed today and developing new plasma applications for next generation material and device fabrication.


Ph.D. 1999

Nuclear Engineering

University of Michigan

M.S.E. 1997

Nuclear Engineering

University of Michigan

B.S.E. 1995

Nuclear Engineering

University of Michigan

Research Description

Dr. Shannon's research is in the industrial applications of plasma discharges.


Driving frequency fluctuations in pulsed capacitively coupled plasmas
Poulose, J., Goeckner, M., Shannon, S., Coumou, D., & Overzet, L. (2017), European Physical Journal. D, Atomic, Molecular and Optical Physics, 71(9).
Electron neutral collision frequency measurement with the hairpin resonator probe
Peterson, D. J., Kraus, P., Chua, T. C., Larson, L., & Shannon, S. C. (2017), Plasma Sources Science & Technology, 26(9).
Size dependence of nanoscale wear of silicon carbide
Tangpatjaroen, C., Grierson, D., Shannon, S., Jakes, J. E., & Szlufarska, I. (2017), ACS Applied Materials & Interfaces, 9(2), 1929–1940.
All the catalytic active sites of MoS2 for hydrogen evolution
Li, G. Q., Zhang, D., Qiao, Q., Yu, Y. F., Peterson, D., Zafar, A., … Cao, L. Y. (2016), Journal of the American Chemical Society, 138(51), 16632–16638.
Amorphization resistance of nano-engineered SiC under heavy ion irradiation
Imada, K., Ishimaru, M., Xue, H. Z., Zhang, Y. W., Shannon, S. C., & Weber, W. J. (2016), Journal of Nuclear Materials, 478, 310–314.
Dose dependence of helium bubble formation in nano-engineered SiC at 700 degrees C
Chen, C. H., Zhang, Y., Wang, Y., Crespillo, M. L., Fontana, C. L., Graham, J. T., … Weber, W. J. (2016), Journal of Nuclear Materials, 472, 153–160.
Fully coupled simulation of the plasma liquid interface and interfacial coefficient effects
Lindsay, A. D., Graves, D. B., & Shannon, S. C. (2016), Journal of Physics. D, Applied Physics, 49(23).
A temporally and spatially resolved electron density diagnostic method for the edge plasma based on Stark broadening
Zafar, A., Martin, E. H., Shannon, S. C., Isler, R. C., & Caughman, J. B. O. (2016), Review of Scientific Instruments, 87(11).
Atomistic structures of nano-engineered SiC and radiation-induced amorphization resistance
Imada, K., Ishimaru, M., Sato, K., Xue, H. Z., Zhang, Y. W., Shannon, S., & Weber, W. J. (2015), Journal of Nuclear Materials, 465, 433–437.
Control of ion energy distributions using phase shifting in multi-frequency capacitively coupled plasmas
Zhang, Y. T., Zafar, A., Coumou, D. J., Shannon, S. C., & Kushner, M. J. (2015), Journal of Applied Physics, 117(23).
Electric field determination in the plasma-antenna boundary of a lower-hybrid wave launcher in Tore Supra through dynamic Stark-effect spectroscopy
Martin, E. H., Goniche, M., Klepper, C. C., Hillairet, J., Isler, R. C., Bottereau, C., … Clairet, F. (2015), Plasma Physics and Controlled Fusion, 57(6).
Momentum, heat, and neutral mass transport in convective atmospheric pressure plasma-liquid systems and implications for aqueous targets
Lindsay, A., Anderson, C., Slikboer, E., Shannon, S., & Graves, D. (2015), Journal of Physics. D, Applied Physics, 48(42).
Competing effects of electronic and nuclear energy loss on microstructural evolution in ionic-covalent materials
Zhang, Y., Varga, T., Ishimaru, M., Edmondson, P. D., Xue, H., Liu, P., … Weber, W. J. (2014), Nuclear Instruments & Methods in Physics Research. Section B, Beam Interactions With Materials and Atoms, 327, 33–43.
Experimental and ab initio study of enhanced resistance to amorphization of nanocrystalline silicon carbide under electron irradiation
Jamison, L., Zheng, M. J., Shannon, S., Allen, T., Morgan, D., & Szlufarska, I. (2014), Journal of Nuclear Materials, 445(1-3), 181–189.
Fertilization of radishes, tomatoes, and marigolds using a large-volume atmospheric glow discharge
Lindsay, A., Byrns, B., King, W., Andhvarapou, A., Fields, J., Knappe, D., … Shannon, S. (2014), Plasma Chemistry and Plasma Processing, 34(6), 1271–1290.
Ion energy distribution skew control using phase-locked harmonic RF bias driveion energy distribution skew control using phase-locked harmonic RF bias drive
Coumou, D. J., Clark, D. H., Kummerer, T., Hopkins, M., Sullivan, D., & Shannon, S. (2014), IEEE Transactions on Plasma Science, 42(7), 1880–1893.
Irradiation-induced microstructural change in helium-implanted single crystal and nano-engineered SiC
Chen, C. H., Zhang, Y., Fu, E., Wang, Y., Crespillo, M. L., Liu, C., … Weber, W. J. (2014), Journal of Nuclear Materials, 453(1-3), 280–286.
Probing the plasma near high power wave launchers in fusion devices for static and dynamic electric fields (invited)
Klepper, C. C., Martin, E. H., Isler, R. C., Colas, L., Goniche, M., Hillairet, J., … Hillis, D. L. (2014), Review of Scientific Instruments, 85(11).
Temperature and irradiation species dependence of radiation response of nanocrystalline silicon carbide
Jamison, L., Sridharan, K., Shannon, S., & Szlufarska, I. (2014), Journal of Materials Research, 29(23), 2871–2880.
Origin of radiation tolerance in 3C-SiC with nanolayered planar defects
Ishimaru, M., Zhang, Y. W., Shannon, S., & Weber, W. J. (2013), Applied Physics Letters, 103(3).
Nanoscale engineering of radiation tolerant silicon carbide
Zhang, Y. W., Ishimaru, M., Varga, T., Oda, T., Hardiman, C., Xue, H. Z., … Weber, W. J. (2012), Physical Chemistry Chemical Physics, 14(38), 13429–13436.
A VHF driven coaxial atmospheric air plasma: electrical and optical characterization
Byrns, B., Wooten, D., Lindsay, A., & Shannon, S. (2012), Journal of Physics. D, Applied Physics, 45(19).
The impact of Langmuir probe geometries on electron current collection and the integral relation for obtaining electron energy distribution functions
El Saghir, A., & Shannon, S. (2012), Plasma Sources Science & Technology, 21(2).
Limitations of regularization methods for the reconstruction of electron velocity distribution function
El Saghir, A., & Shannon, S. (2011), IEEE Transactions on Plasma Science, 39(4), 1034–1037.
Reduction of EEDF measurement distortion in regularized solutions of the druyvesteyn relation
El Saghir, A., & Shannon, S. (2011), IEEE Transactions on Plasma Science, 39(1), 596–602.
Electron energy distribution function extraction using integrated step function response and regularization methods
El Saghir, A., Kennedy, C., & Shannon, S. (2010), IEEE Transactions on Plasma Science, 38(2), 156–162.
Special issue on advances on plasma processing for semiconductor manufacturing
Shannon, S., Kinder, R., Paterson, A., Rauf, S., & Ventzek, P. L. G. (2009), IEEE Transactions on Plasma Science, 37(9), 1662–1664.

View all publications via NC State Libraries


Multi-Frequency Harmonic Drive for Enhanced Control in HAR Processes, CPLAM Core Project
Plasma-Therm(6/01/18 - 5/31/19)
Collaborative Research: SI2-SSE: An open source multi-physics platform to advance fundamental understanding of plasma physics and enable impactful application of plasma systems
National Science Foundation (NSF)(9/01/17 - 8/31/19)
Reactor Design and Effectiveness of Design in Depyrogenation Processes using Karamedica Data.
Karamedica Inc.(2/15/17 - 9/30/17)
Construction and Characterization of a Pulsed Gas Delivery System to Elucidate Plasma Response to Time Varying Gas Composition
Samsung Electro-Mechanics Co. Ltd.(1/23/17 - 3/31/18)
Samsung Mechatronics Research Division Directed Research in Low Temperature Plasma Science
Samsung Electronics Co., Ltd. - Korea(5/01/16 - 4/30/19)
Turbulent MHD flow modeling in annular linear induction pumps with validation experiments
US Dept. of Energy (DOE)(10/01/16 - 9/30/19)
International Experiences for Students in Plasma Science: Student Travel Support to Attend the 2016 Gaseous Electronics Conference
National Science Foundation (NSF)(9/01/16 - 2/28/17)
Ion energy measurement in industrial plasma reactors
Tokyo Electron America, Inc.(1/01/16 - 8/31/18)
Industry/University Cooperative Research Center for Lasers and Plasmas for Advanced Manufacturing (CLPAM), Full Membership
Plasma-Therm(1/01/15 - 12/31/15)
MKS C-LPAM IUCRC Full Membership - Year 1
MKS Instruments (1/01/15 - 12/31/16)