Steven Shannon

Professor of Nuclear Engineering, Director of Nuclear Engineering Graduate Program

Dr. Steve Shannon works in the area of industrial applications of plasma discharges. Plasmas are currently used for everything from decorative enhancement of bathroom fixtures to fabrication of the next generation of micro- and nano- scale devices. Plasma systems for industrial applications is a multi-billion dollar industry. His research focuses on enhancing current plasma applications being used and developed today and developing new plasma applications for next generation material and device fabrication.


Ph.D. 1999

Nuclear Engineering

University of Michigan

M.S.E. 1997

Nuclear Engineering

University of Michigan

B.S.E. 1995

Nuclear Engineering

University of Michigan

Research Description

Dr. Shannon's research is in the industrial applications of plasma discharges.


Effect of dielectric target properties on plasma surface ionization wave propagation
Morsell, J., Bhatt, N., Dechant, C., & Shannon, S. (2023), Journal of Physics D: Applied Physics.
Comparison of glancing-angle scatterings on different materials in a high aspect ratio plasma etching process using molecular dynamics simulation
Du, Y., Kruger, F., Nam, S. K., Lee, H., Yoo, S., Eapen, J., … Shannon, S. (2022), JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 40(5).
Electron temperature measurements with a hairpin resonator probe in a pulsed low pressure capacitively coupled plasma
Peterson, D., Xiao, Y., Ford, K., Kraus, P., & Shannon, S. (2021), Plasma Sources Science and Technology, 5.
Focus ring geometry influence on wafer edge voltage distribution for plasma processes
Xiao, Y., Du, Y., Smith, C., Nam, S. K., Lee, H., Lee, J.-Y., & Shannon, S. (2021), Journal of Vacuum Science & Technology A.
Modulating power delivery in a pulsed ICP discharge via the incorporation of negative feedback mechanisms
Smith, C. L., Nam, S. K., Bae, K., Lee, J.-Y., & Shannon, S. (2021), JOURNAL OF APPLIED PHYSICS, 130(16).
Erratum: Power Matching to Pulsed Inductively Coupled Plasmas [J. Appl. Phys. 127, 133302 (2020)]
Qu, C., Lanham, S. J., Shannon, S. C., Nam, S. K., & Kushner, M. J. (2020), Journal of Applied Physics.
Power matching to pulsed inductively coupled plasmas
Qu, C., Lanham, S. J., Shannon, S. C., Nam, S. K., & Kushner, M. J. (2020), Journal of Applied Physics.
Radiofrequency phase resolved electron density measurements with the hairpin resonator probe
Peterson, D. J., Ford, K., Brandon, J., Shannon, S. C., Koh, T., Chua, T. C., … Kraus, P. A. (2020), JOURNAL OF PHYSICS D-APPLIED PHYSICS, 53(14).
Complex transients in power modulated inductively-coupled chlorine plasmas
List, T., Ma, T., Arora, P., Donnelly, V. M., & Shannon, S. (2019), Plasma Sources Science and Technology, 28(2), 025005.
Doppler-free, Stark broadened profiles at low plasma densities in helium
Zafar, A., Martin, E., & Shannon, S. (2019), Journal of Quantitative Spectroscopy and Radiative Transfer, 230, 48–55.

View all publications via NC State Libraries


Nuclear Energy University Programs - Fellowship and Scholarship Support North Carolina State University
US Dept. of Energy (DOE)(8/01/21 - 8/31/33)
Harnessing (bio-)electrochemical Technologies as Sustainable Sources for on Demand Precision Agriculture
Game-Changing Research Incentive Program for Plant Sciences (GRIP4PSI)(2/17/20 - 6/30/23)
North Carolina State University's Graduate Fellowship In Nuclear Engineering (NCSU-GFINE)– 2018
US Nuclear Regulatory Commission(8/30/19 - 8/29/23)
Center for Low Temperature Plasma Interactions with Complex Interfaces
US Dept. of Energy (DOE)(8/15/19 - 8/14/23)
Fabrication of Plasma Source for Chitosan Depyrogenation
National Institutes of Health (NIH)(5/01/18 - 3/31/21)
Multi-Frequency Harmonic Drive for Enhanced Control in HAR Processes, CPLAM Core Project
Plasma-Therm(6/01/18 - 5/31/19)
Collaborative Research: SI2-SSE: An open source multi-physics platform to advance fundamental understanding of plasma physics and enable impactful application of plasma systems
National Science Foundation (NSF)(9/01/17 - 5/31/21)
Reactor Design and Effectiveness of Design in Depyrogenation Processes using Karamedica Data.
Karamedica Inc.(2/15/17 - 9/30/17)
Construction and Characterization of a Pulsed Gas Delivery System to Elucidate Plasma Response to Time Varying Gas Composition
Samsung Electro-Mechanics Co. Ltd.(1/23/17 - 3/31/18)
Samsung Mechatronics Research Division Directed Research in Low Temperature Plasma Science
Samsung Electronics Co., Ltd. - Korea(5/01/16 - 12/31/23)