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Department of Nuclear Engineering

Upcoming Events

March 2017

Plasma-Surface Interactions with Complex (Inorganic, Liquid, Living) Materials

March 2 @ 4:00 pm - 5:00 pm
1202 Burlington Labs, 2500 Stinson Drive
Raleigh, NC 27695-7909 United States

Mark J. Kushner University of Michigan Abstract Plasma surface interactions are indispensable in materials processing over a large range of applications and a wide range of pressures.  Tremendous progress has been made in optimizing reactive fluxes in low pressure plasmas for microelectronics fabrication.  Tradeoffs between damaging fluxes and rapid rates of etching or deposition are based on understanding how incident reactive fluxes affect both the surface and sub-surface of the materials.  These investigations continue to provide unexpected results.  The recent…

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